有机半导体薄膜的形成方法及薄膜半导体装置的制造方法

Method for forming organic semiconductor thin film and method of manufacturing thin-film semiconductor device

Abstract

本发明提供了一种有机半导体薄膜的形成方法,包括以下步骤:在印刷板的主平面上形成混合墨水层,该混合墨水层包括以溶解于溶剂中的墨水形式从印刷板到基板不能转印的有机半导体材料和能够转印的有机材料的混合物,以及通过将印刷板上的混合墨水层转印到基板,形成将混合墨水层转印到基板上的有机半导体薄膜。在通过转印印刷形成有机半导体薄膜的有机半导体材料的选择方面,本发明显示出高的自由度,并因此能够通过采用印刷方法制造表现出良好性能的薄膜半导体装置。
A method for forming an organic semiconductor thin film includes the steps of forming a mixed ink layer on a principal plane of a printing plate, the mixed ink layer including a mixture of an organicsemiconductor material incapable of transcription and an organic material capable of transcription from the printing plate to a substrate in ink form dissolved in a solvent, and forming an organic semiconductor thin film by transcribing the mixed ink layer onto the substrate by transcribing the mixed ink layer on the printing plate to the substrate.

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